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Application of photomask substrate in integrated circuit manufacturing
Release time:
2023-04-12
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photomask substrateIt is a manufacturing method commonly used in semiconductor processing, and the required patterns and structures are formed by using masks and illumination techniques on silicon wafers. Its manufacturing process is simple, can efficiently produce a large number of tiny chips, so it is widely used in semiconductors, optoelectronics, biomedical, and micro-mechanical systems and other fields.

The main features of the photomask substrate are high manufacturing precision, good repeatability, reusable, and relatively stable physical and chemical properties, which can meet the structural and performance requirements of different industries. At the same time, it is also an important basis for microelectronics and optoelectronic devices.
With the continuous development of modern science and technology, photomask substrate has become a representative of high-tech fields, and is widely used in various fields, such as semiconductor manufacturing, micro-mechanical systems, biomedical, etc., and its application is becoming more and more extensive.
Although the manufacture and application of photomask substrates are quite mature, there are a large number of brands and manufacturers competing in the market. However, with the acceleration of scientific and technological progress, the demand for high-precision manufacturing is also increasing, how to innovate and upgrade the photomask substrate has become a problem that manufacturers need to think about. This is also a problem that we need to constantly explore and try. Only through continuous efforts can we achieve better scientific and technological achievements and commercial performance.
photomask substrateIt is a semiconductor process material commonly used in integrated circuit manufacturing and is of great significance. The process needs to go through multiple steps, including mask production, mask transfer, cleaning, etc., in which mask production is a key step.
The mask is produced by the chemical reaction generated after the infrared laser irradiates the photomask plate. The shape of the mask is completely determined by the pattern on the mask plate, so it is necessary to use CAD software to design the mask and perform corresponding operations on the lithography machine. This operation will cause the corresponding photoresist to change under the irradiation of the infrared laser, and then fix it on the substrate under the cleaning of the purification liquid.
Mask transfer refers to a process of printing a pattern on a mask onto a substrate. It is done in both contact and non-contact ways. Contact type is to fix the photomask on the substrate, and use rubber pressure or mechanical pressure to print the pattern on the mask on the substrate; non-contact type is to use the projector to directly shine the pattern on the mask on the substrate, which can be said to be a very efficient technical means.
With the continuous development of integrated circuit technology, the importance of photomask is becoming more and more important. In the future, with the continuous innovation of technology, photomask substrates will have a wider range of applications in more fields, making the semiconductor industry better promote the development of human beings. In short, the photomask substrate has an extremely important position in semiconductor manufacturing. These substrates are manufactured in cooperation with a number of processes, including mask making, mask transfer, and cleaning. In addition to being widely used in chip manufacturing, photomasks are also used in other technologies, and will be more widely used in the future as semiconductor technology continues to advance.
Photomask substrate, reticle substrate
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